Investigation of the milling characteristics of different focused-ion-beam sources assessed by three-dimensional electron diffraction from crystal lamellae

Parkhurst JM., Crawshaw AD., Siebert CA., Dumoux M., Owen CD., Nunes P., Waterman D., Glen T., Stuart DI., Naismith JH., Evans G.

DOI

10.1107/S2052252523001902

Type

Journal article

Publication Date

2023-01-01T00:00:00+00:00

Volume

10

Pages

270 - 287

Total pages

17

Keywords

pFIB milling, crystal lamellae, 3DED, beam damage, 3D electron diffraction

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